InGaN/GaN micro mirror with electrostatic comb drive actuation integrated on a patterned silicon-on-insulator wafer
نویسندگان
چکیده
منابع مشابه
Micro-gravity capacitive silicon-on-insulator accelerometers
In this paper, the implementation and characterization of high-sensitivity in-plane capacitive micro-gravity silicon-on-insulator (SOI) accelerometers with the readout circuitry are presented. The devices were implemented in 50 μm thick SOI substrates using a two-mask dry-release process. The fabricated accelerometers were interfaced to a low-noise low-power reference-capacitor-less switched-ca...
متن کاملA two-dimensional ƒ-θ micro optical lens scanner with electrostatic comb-drive XY-stage
We report the design, fabrication and electromechanical performance of a newly developed micro electromechanical XYscanner for micro-optical spatial light modulation using the silicon micromachining technology. A two-dimensional stage is integrated with a silicon micro lens to scan a transmitting infrared light of 1.55-micronwavelength by the mechanism of the f -θ lens scanner. Mechanical displ...
متن کاملLabel-free Biosensing Using Cascaded Silicon-on-insulator Micro-racetrack Resonators Integrated with Pdms Microfluidic Channels
This paper demonstrates a label-free biosensing platform using Silicon-On-Insulator (SOI) micro-racetrack resonators, cascaded such that multiple measurements can be made using a single input and output waveguide and therefore a single detector. The devices are integrated with poly(dimethylsiloxane) microfluidic channels in order to characterize the devices’ sensing properties. Both bulk refrac...
متن کاملPhotonic Bands in Patterned Silicon-on-Insulator Waveguides
One– and two-dimensional photonic crystals are obtained by electron beam lithography and reactive ion etching on silicon-on-insulator waveguides. Variable-angle reflectance is measured and calculated in the 0.2–2-eV energy range, giving evidence of the quasi-guided modes of the photonic structure. Photonic bands in the one-dimensional case are determined and compare very well to those calculate...
متن کاملElectrostatic-comb Drive of Lateral Polysilicon Resonators
This paper mvestlgates the elcctrostatlc dnve and sense of polynhcon resonators parallel to the substrate, using an mterdlgtated capacitor (electrostatic comb) Three expenmental methods are used nucroscoplc observation mth contmuous or stroboscopic iummatlon, capacltlve sensing using an amphtude-modulation technique and SEM observation The mtnnslc quality factor of the phosphorus-doped low-pres...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Optics Express
سال: 2018
ISSN: 1094-4087
DOI: 10.1364/oe.26.007672